202 B
202 B
| 1 | Wafer ID=A12 |
|---|---|
| 2 | Acquisition Date=03/26/2025 |
| 3 | Label,1,2,3 |
| 4 | X (mm),0,10,-10 |
| 5 | Y (mm),10,-10,-10 |
| 6 | data |
| 7 | 0.0,150.0,149.5,151.6 |
| 8 | 0.5,150.2,149.4,151.7 |
| 9 | 1.0,150.1,149.6,151.5 |
| 10 | 1.5,150.3,149.7,151.4 |
| 11 | 2.0,150.4,149.8,151.3 |