Wafer ID=A12 Acquisition Date=03/26/2025 Label,1,2,3 X (mm),0,10,-10 Y (mm),10,-10,-10 data 0.0,150.0,149.5,151.6 0.5,150.2,149.4,151.7 1.0,150.1,149.6,151.5 1.5,150.3,149.7,151.4 2.0,150.4,149.8,151.3